„… . Abstract A system is presented which enables the production-related measurement of surface roughness …” „… , surface defects and micro geometries on large and high-precision parts. A highresolution optical 3D sensor …” „… . 4. Referenzen [1] ISO/CD 25178-606: 2015, Geometrical product specification (GPS) – Surface texture …”

„… technology for high resolution optical 3D surface metrology, Journal of Mech. Eng., 57(3):245-256, 2011 [7 …” „… : Optical Measurement of Surface Topography. Springer-Verlag, Berlin, 2011 [4] ISO 10360-8: 2013 …” „… product specification (GPS) – Surface texture: Areal Part 606: Nominal characteristics of non-contact …”

„… interferometry. Surface Topography: Metrology and Properties 4 (2016) 2 S. 024004 [14] Hagemeier, S. u. Lehmann …” „… , Vortrag /Poster zur 1st 3D Metrology Conference - 3DMC 2016, 22. – 24.11.2016, RWTH Aachen, Germany. [18 …” „… knowledge of the surface structure to be measured is necessary. This can be achieved by comparison …”

„… approaches for asphere polishing and metrology“, 2005, Bd. 5638, S. 284–299. [3] M. Kuechel, „Absolute …” „… Measurement of Rotationally Symmetric Aspheric Surfaces“, in Optical Fabrication and Testing 2006, Rochester …”

„… surface metrology. J. of Mech. Eng. 57(3), S. 245–256, 2011 [10] Schuth, M., Buerakov, W.: Handbuch …” „… optische Messtechnik, Hanser-Verlag, 2017 [11] Leach, R.K: Optical Measurement of Surface Topography …”

„… and transparent surfaces Dr.-Ing. Marcus Petz, Dr.-Ing. Marc Fischer, Prof. Dr.-Ing. Rainer …” „… .; Bach, C.; Ziolek, C.: Automated surface inspection of small customer-specific optical elements. tm …” „… , W.: itom: an open source metrology, automation, and data evaluation software, Appl. Opt. 53, 2014 …”

„… parameter rash – is there a cure?. Wear (1982) 83 [11] Whitehouse, D. J.: Handbook of Surface Metrology. IOP …” „… in mechanical enginee-ring – Part 3: Scaling of manufacturing systems and metrology Abstract Part 3 …” „… the quality of the ma-nufacturing processes an integration of metrology is indispensable …”

„… durch „Science and Technology Roadmaps for Me-trology“ der metrologischen Staatsinstitute (Euramet e.V …” „… tasks in micro and nano metrology with decreasing structural dimensions and increasing aspect ratios …” „… metrology. Annals of the CIRP 55 (2006) No. 2, pp. 721-743 [2] Zhang, X.; Gao, H.; Guo, Y.; Zhang, G …”

„… to specific surface structures of the functional surfaces. A reduction of surface roughness combined …” „… with tailored surface structuring offers a longer service life and higher power density of rolling …” „… Firma Jenoptik Industrial Metrology Germany GmbH verwendet. Mit dem Messsystem können …”

„… rates and surface topographies: for two-body abrasion, micro-ploughing or micro-cutting are dominant. In …” „… . If a definite surface topography is intended by polishing, the decisive parameters determining the …” „… governing removal mechanisms and, therefore, surface topography have to be known. Titelthema …”

„… workflow control, a robot guided tool head to perform the polishing procedure and metrology to monitor the …” „… Proceedings Vol. 8495, Reflection, Scattering, and Diffraction from Surfaces III, 84950T, 2012 [3] Preston, F …”

„… , Hexagon Metrology GmbH, Wetzlar Kurzfassung In der Präzisionslängenmesstechnik ist die …” „… storage of the workpiece result in differences of the surface temperature and the temperature inside the …” „… is monitored during length measurements, and the temperatures on the surface of the workpieces are …”

„… relationship between functional behavior and the surface of a component, roughness is typically measured with …” „… : www.mv.uni-kl.de/fbk Dr. Raimund Volk, Dipl.-Ing. Stefan Feifel Jenoptik Industrial Metrology Germany GmbH Alte …” „… danken die Autoren den Industriepartnern des Teilprojekts OptoSurf GmbH, Jenoptik Industrial Metrology …”